UV lamps can be used to generate ozone (O3), if suitable material (pure or synthetic quartz) is used for the lamp tube. Such materials do not block wavelengths below 200nm and for the standard mercury UV lamps, the wavelength responsible for ozone production is 185nm. These ozone generators are, therefore, sometimes called vacuum-ultraviolet (VUV or UVV) ozone generators.

UV lamps are a fairly inefficient ozone source, in comparison to corona discharge ozone generators, but the ozone generated by the UV lamps in conjunction with UVC radiation at 254nm, helps to achieve much better results in odour treatment applications.

VUV ozone generators, unlike corona discharge generators, do not produce harmful nitrogen by-products and work extremely well in humid air environments. There is also not normally a need for expensive off-gas mechanisms and no need for air driers or oxygen concentrators, which require extra costs and maintenance.